Lieberman (Michael A.)
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg. - 2nd ed.. - Hoboken John Wiley 2005. - xxxv, 757p. ill. 25cm
Includes bibliographical references and index
0471720011
Plasma chemistry--Industrial applications
Plasma dynamics
530.44 LIE 2005
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg. - 2nd ed.. - Hoboken John Wiley 2005. - xxxv, 757p. ill. 25cm
Includes bibliographical references and index
0471720011
Plasma chemistry--Industrial applications
Plasma dynamics
530.44 LIE 2005