Fundamentals of microfabrication and nanotechnology : from MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications (vol. 3) / Marc J. Madou..

By: Madou, Marc JMaterial type: TextTextPublisher: Boca Raton CRC Press c2012Edition: 3rd edDescription: 3v ill. (some col.) 29cmISBN: 9781420055160Subject(s): BioMEMS | Nanoelectromechanical systemsDDC classification: 620.5 MAD 2012
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