Lieberman (Michael A.)  <br/><br/>
Principles of plasma discharges and materials processing  
/ Michael A. Lieberman, Allan J. Lichtenberg. 
 - 2nd ed.. 
 - Hoboken  John Wiley  2005. 
 - xxxv, 757p.  ill.  25cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0471720011  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma chemistry--Industrial applications<br/>Plasma dynamics
<br/><br/><label>Dewey Class. No.: </label>530.44 LIE 2005