TY  - BOOK
AU  - Lieberman (Michael A.) 
AU  - Lichtenberg, Aan J.
TI  - Principles of plasma discharges and materials processing 
SN  - 0471720011 
U1  - 530.44 LIE 2005 
PY  - 2005///
CY  - Hoboken
PB  - John Wiley
KW  - Plasma chemistry
KW  - Industrial applications
KW  - Plasma dynamics
N1  - Includes bibliographical references and index
ER  -