Integrated microsystems : electronics, photonics, and biotechnology  
/ edited by Krzysztof Iniewski. 
 - Boca Raton  CRC Press  c2012. 
 - xviii, 742p  ill  27cm 
<br/><br/><label>ISBN: </label>9781439836200  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated optics<br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.31042 INT 2012