TY  - BOOK
AU  - Iniewski, Krzysztof
TI  - Integrated microsystems : electronics, photonics, and biotechnology 
SN  - 9781439836200 
U1  - 621.31042 INT 2012 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Integrated optics
KW  - Microelectromechanical systems
ER  -