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1.
Fundamentals of microfabrication and nanotechnology : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology (vol. 1) / Marc J. Madou..

by Madou, Marc J.

Edition: 3rd ed..Material type: Text Text Publisher: Boca Raton CRC Press c2012Availability: Items available for loan: Call number: 620.5 MAD 2012 (3).

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2.
Fundamentals of microfabrication and nanotechnology : from MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications (vol. 3) / Marc J. Madou..

by Madou, Marc J.

Edition: 3rd ed..Material type: Text Text Publisher: Boca Raton CRC Press c2012Availability: Items available for loan: Call number: 620.5 MAD 2012 (3).

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3.
Fundamentals of microfabrication and nanotechnology : manufacturing techniques for microfabrication and nanotechnology (vol. 2) / Marc J. Madou..

by Madou, Marc J.

Edition: 3rd ed..Material type: Text Text Publisher: Boca Raton CRC Press c2012Availability: Items available for loan: Call number: 620.5 MAD 2012 (3). Items available for reference: Not for loanCall number: 620.5 MAD 2012 (1).

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